基区结构对短波红外异质结晶体管探测器弱光探测性能的影响与机理研究
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1.中国科学院半导体研究所 纳米光电子实验室;2.浙江大学 环境与资源学院

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国家自然科学基金(62204014,62174156)


Influence and Mechanism of Base Structure on the Weak-Light Photodetection of Short-Wave Infrared Heterojunction Phototransistor
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Affiliation:

1.Nano Opto-Electronics Laboratory,Institute of Semiconductors,Chinese Academy of Sciences;2.College of Environmental and Resource Sciences,Zhejiang University

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National Natural Science Foundation of China (NSFC) (62204014,62174156)

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    摘要:

    高灵敏度短波红外探测技术在激光雷达、量子通信等前沿领域需求迫切。异质结光电晶体管(HPT)凭借其内增益机制,为突破传统二极管探测器灵敏度瓶颈提供了有效方案。本文聚焦于InP/GaAsSb/InGaAs二类接触异质结HPT的基区结构对探测器性能的影响,通过控制刻蚀工艺制备了两种不同基区结构的器件。研究表明,保持完整的大尺寸基区结构可显著提升器件性能:其在-2 V偏压下的响应度与内部电流增益分别达141 A/W和160,显著优于小尺寸基区结构的器件。变温测试分析与尺寸效应研究进一步揭示,大尺寸基区器件的暗电流以扩散机制主导,光生载流子输运和收集效率更高,且具有更优异的尺寸稳定性;而小尺寸基区器件则因侧壁缺陷引入显著的产生-复合电流和表面漏电流,并在低温弱光下因缺陷对载流子俘获作用导致光响应急剧劣化。本研究明确了基区结构设计对HPT性能的关键影响,为高性能短波红外探测器的优化设计提供了重要的理论和实验依据。

    Abstract:

    The demand for high-sensitivity short-wave infrared (SWIR) detection technology is urgent in frontier fields such as lidar and quantum communication. Heterojunction phototransistor (HPT), benefiting from its internal gain mechanism, provides an effective solution for breaking the physical limit of conventional PIN photodetector in sensitivity. This paper focuses on the base-size effect of InP/GaAsSb/InGaAs HPTs with type-II barrier structure. Devices with two different base structures were fabricated by controlling the etching process. Measurement results show that maintaining an intact base structure significantly improves device performance: at a bias voltage of ?2 V, the responsivity and internal current gain reach 141 A/W and 160, respectively—superior to those of devices with etched bases. Temperature-dependent analysis and size-effect studies further reveal that the dark current of the intact-base device is dominated by diffusion mechanisms and exhibits better dimensional stability, whereas the etched-base device suffers from pronounced generation–recombination current and surface leakage current caused by sidewall defects. Under low-temperature and weak-light conditions, carrier trapping by these defects leads to severe degradation of photo response. This study clarifies the critical influence of base structural design on HPT performance and provides valuable theoretical and experimental guidance for optimizing high-performance SWIR detectors.

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  • 收稿日期:2025-12-03
  • 最后修改日期:2025-12-19
  • 录用日期:2025-12-25
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