Effective enhancement of the photoluminescence from the Si+/Ni+ ions co-implanted SOI by directly constructing the nanodisk photonic crystals
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Affiliation:

1.National Center for International Research on Photoelectric and Energy Materials, School of Materials and Energy, Yunnan University, Kunming 650091, China;2.Centre for Translational Atomaterials, Swinburne University of Technology, Hawthorn 3122, Australia;3.College of Electronic and Information Engineering, Shanghai University of Electric Power, Shanghai 200090, China.

Clc Number:

O433.2

Fund Project:

Supported by the National Natural Science Foundation of China (11564043, 11504322, 11704330), Joint Foundation of Provincial Science and Technology Department-Double First-class Construction of Yunnan University ( 2019FY003016), the Reserve Talents of Academic and Technical Leader Project ( 2017HB001), Young Top Talent Project(YNWR-QNBJ- 2018-229), and the Application Basic Research Project (2019FB130) of Yunnan Province.

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    Abstract:

    An effective enhancement of the photoluminescence from the Si+/Ni+ ions co-implanted silicon-on-insulator (SOI) by directly constructing the Au nanodisk-array photonic crystals is reported. The finite-difference time-domain method (FDTD) was employed to design and analyze the luminescence amplification of the metal film with a photonic crystal structure for luminesce from the optical defects in the SOI. The Langmuir-Blodgett (LB) method and inductively coupled plasma (ICP) etching were used to fabricate the etched Au-nanostructure photonic crystal directly on the top of SOI wafers. It indicates that the introduction of polystyrene (PS) spheres can effectively improve the luminescent efficiency in the near infrared waveband. This photonic crystal with simply fabricating processes and high efficiency exhibits great application on the optical quantum of Si-based photonics.

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TONG Hao-Chen, TANG Shu-Min, YE Shu-Ming, Duan Xiao-xiao, LI Xiao-Nan, XIE Ji-Yang, ZHANG Lu-Ran, YANG Jie, QIU Feng, WANG Rong-Fei, WEN Xiao-Ming, Yang Yu, CUI Hao-Yang, WANG Chong. Effective enhancement of the photoluminescence from the Si+/Ni+ ions co-implanted SOI by directly constructing the nanodisk photonic crystals[J]. Journal of Infrared and Millimeter Waves,2021,40(5):680~684

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History
  • Received:December 29,2020
  • Revised:September 10,2021
  • Adopted:March 16,2021
  • Online: September 09,2021
  • Published: