Effective enhancement of the photoluminescence from the Si+/Ni+ ions co-implanted SOI by directly constructing the nanodisk photonic crystals
Received:December 29, 2020  Revised:September 10, 2021  download
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Author NameAffiliationE-mail
TONG Hao-Chen National Center for International Research on Photoelectric and Energy Materials School of Materials and Energy Yunnan University Kunming 650091 China 2212301592@qq.com 
TANG Shu-Min National Center for International Research on Photoelectric and Energy Materials School of Materials and Energy Yunnan University Kunming 650091 China tangshuminabc@163.com 
YE Shu-Ming National Center for International Research on Photoelectric and Energy Materials School of Materials and Energy Yunnan University Kunming 650091 China ysming97@163.com 
Duan Xiao-xiao National Center for International Research on Photoelectric and Energy Materials School of Materials and Energy Yunnan University Kunming 650091 China  
LI Xiao-Nan National Center for International Research on Photoelectric and Energy Materials School of Materials and Energy Yunnan University Kunming 650091 China  
XIE Ji-Yang National Center for International Research on Photoelectric and Energy Materials School of Materials and Energy Yunnan University Kunming 650091 China  
ZHANG Lu-Ran National Center for International Research on Photoelectric and Energy Materials School of Materials and Energy Yunnan University Kunming 650091 China  
YANG Jie National Center for International Research on Photoelectric and Energy Materials School of Materials and Energy Yunnan University Kunming 650091 China jieyang@ynu.edu.cn 
QIU Feng National Center for International Research on Photoelectric and Energy Materials School of Materials and Energy Yunnan University Kunming 650091 China  
WANG Rong-Fei National Center for International Research on Photoelectric and Energy Materials School of Materials and Energy Yunnan University Kunming 650091 China rfwang@ynu.edu.cn 
WEN Xiao-Ming Centre for Translational Atomaterials Swinburne University of Technology Hawthorn 3122 Australia  
Yang Yu National Center for International Research on Photoelectric and Energy Materials School of Materials and Energy Yunnan University Kunming 650091 China  
CUI Hao-Yang College of Electronic and Information Engineering Shanghai University of Electric Power Shanghai 200090 China.  
WANG Chong National Center for International Research on Photoelectric and Energy Materials School of Materials and Energy Yunnan University Kunming 650091 China cwang@ynu.edu.cn 
Abstract:An effective enhancement of the photoluminescence from the Si+/Ni+ ions co-implanted silicon-on-insulator (SOI) by directly constructing the Au nanodisk-array photonic crystals is reported. The finite-difference time-domain method (FDTD) was employed to design and analyze the luminescence amplification of the metal film with a photonic crystal structure for luminesce from the optical defects in the SOI. The Langmuir-Blodgett (LB) method and inductively coupled plasma (ICP) etching were used to fabricate the etched Au-nanostructure photonic crystal directly on the top of SOI wafers. It indicates that the introduction of polystyrene (PS) spheres can effectively improve the luminescent efficiency in the near infrared waveband. This photonic crystal with simply fabricating processes and high efficiency exhibits great application on the optical quantum of Si-based photonics.
keywords:infrared physics  photoluminescence  ion co-implantation  silicon on insulator  photonic crystal  plasma
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《Journal of Infrared And Millimeter Waves》