Abstract:Mn1.56Co0.96Ni0.48O4 （MCNO） thin films with spinel structure were grown on YSZ （100） substrates at different deposition temperatures from 500℃ to 700℃ by pulsed laser deposition. Since the deposition temperature is an important factor in fabricating high-quality films， the structural， electrical and magnetic properties of MCNO thin films as a function of deposition temperature are investigated. By analyzing the X-ray diffraction patterns and the atomic force microscopy images， it is discovered that the crystallization of MCNO films is highly dependent on the deposition temperature. With the increasing deposition temperature， the resistivity of MCNO thin films is a change of V-type， and the electrical conduction of the MCNO films is controlled by a small polaron hopping mechanism. Meanwhile， the temperature-dependent magnetization curve reveals that all the samples show ferromagnetism to paramagnetism transition and the MCNO film deposited at 600℃ has a high Curie temperature of 216 K. All the results above demonstrate that MCNO film deposited at 600℃ has satisfactory performance， which is desirable for applications of thermistor devices and multifunctional heterojunctions.