A response time measurement method For MEMS IR Detectors
Received:December 10, 2019  Revised:August 18, 2020  download
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Author NameAffiliationE-mail
ZHANG Chen-Chen North University of China, Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, Shanxi Provincial Key Laboratory of Dynamic Testing Technology, Taiyuan 030051, China
Institute of Microelectronics of Chinese Academy of Sciences, Beijing 100029, China 
Zhangchenchen@ime.ac.cn 
MAO Hai-Yang Institute of Microelectronics of Chinese Academy of Sciences, Beijing 100029, China
Advanced Sensing Department, Wuxi Internet of Things Innovation Center Co. Ltd., Wuxi 214001, P. R. China 
maohaiyang@ime.ac.cn 
BAI Le-Le State key laboratory of Quantum Optics and Quantum Optics Devices, Shanxi University, Shanxi, Taiyuan 030051, China  
XIONG Ji-Jun North University of China, Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, Shanxi Provincial Key Laboratory of Dynamic Testing Technology, Taiyuan 030051, China  
WANG Wei-Bing Institute of Microelectronics of Chinese Academy of Sciences, Beijing 100029, China  
CHEN Da-Peng Institute of Microelectronics of Chinese Academy of Sciences, Beijing 100029, China
Advanced Sensing Department, Wuxi Internet of Things Innovation Center Co. Ltd., Wuxi 214001, P. R. China 
 
Abstract:As is known, response time of a MEMS infrared (IR) detector is usually measured using a complicated measurement system consisting of a blackbody radiation source, a chopper and a water-cooling apparatus. For such a system, both blocking and hollow patterns in the chopper have certain areas, which consume a certain part of time when the chopper spins at a certain frequency. In conventional measurements of response time, however, it is difficult to exclude the time consumed by a chopper, as a result, a large error is usually introduced into the system. To address such an issue, a response time measurement system for MEMS IR detectors using a fast-pulse laser as its radiation source is proposed in this work. Such a system is able to avoid extra time parameter being introduced by equipment . For a thermopile IR detector, response time measured based on traditional method is 14.46ms, while based on the newly established system, the response time is only 3.13ms. This indicates that the new method can perfectly avoid a 300% time error introduced by the traditional method.
keywords:laser  MEMS IR detectors  response time  chopper
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Copyright:《Journal of Infrared And Millimeter Waves》