CMOS compatible multichannel mid-infrared photonic crystal sensor
Received:November 12, 2019  Revised:March 28, 2020  download
Citation:
Hits: 111
Download times: 93
Author NameAffiliationE-mail
ZHOU Yi Laboratory of Silicon based Materials and Integrated Devices, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China yizhou1012@mail.sim.ac.cn 
WANG Lei Laboratory of Silicon based Materials and Integrated Devices, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China  
LI Jun Laboratory of Silicon based Materials and Integrated Devices, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China  
YANG Xue-Lei Laboratory of Silicon based Materials and Integrated Devices, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China  
GAN Feng-Yuan Laboratory of Silicon based Materials and Integrated Devices, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China  
ZHAO Ying-Xuan Laboratory of Silicon based Materials and Integrated Devices, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China  
QIU Chao Laboratory of Silicon based Materials and Integrated Devices, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China  
LI Wei Laboratory of Silicon based Materials and Integrated Devices, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China  
Abstract:We propose a multichannel two-dimensional optical chemical sensor in a photonic crystal (PhC) slab. The device is composed of four cavities with a center wavelength at 3.3μm, and the channels are spaced by 10nm. The sensor is designed on an 800-nm-thick silicon-on-insulator platform for standard CMOS technology. The optical characteristics of the nanocavity structure are simulated by 3-D finite difference time-domain (FDTD) method. The transmittance of each channel is about 39%, with non-uniformity of transmittance across channels less than 0.25dB. The capability of the sensor is demonstrated by detecting carbon tetrachloride and benzene solutions, and shows a sensitivity of 209.2nm/RIU.
keywords:photonic crystal  sensor  multichannel  mid-infrared
View Full Text  HTML  View/Add Comment  Download reader

Copyright:《Journal of Infrared And Millimeter Waves》