Infrared optical properties of one-dimensional 4H-SiC gratings and its nano-ruler application
Received:August 06, 2019  Revised:April 04, 2020  download
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Author NameAffiliation
TUHTASUN Merdan Department of Physics, Shanghai Normal University, Shanghai 200234, China 
FAN Chen-Fang Department of Physics, Shanghai Normal University, Shanghai 200234, China 
LI Xiao-Wen Department of Physics, Shanghai Normal University, Shanghai 200234, China 
SHI Hui Department of Physics, Shanghai Normal University, Shanghai 200234, China 
LIU Feng Department of Physics, Shanghai Normal University, Shanghai 200234, China
Key Laboratory for Astrophysics, Shanghai Normal University, Shanghai 200234, China 
Abstract:The optical properties of one-dimensional 4H-SiC gratings have been studied both theoretically and experimentally. Four optical modes are observed in the grating structure: propagating surface plasmon polaritons (PSPhPs), dipole mode, localized surface phonon polaritons and quasi-static surface phonon polaritons. Furthermore, dielectric materials with various thicknesses were deposited on the grating surfaces by the atomic layer deposition. By utilizing the sensitivity of the PSPhPs mode to the parameters of the grating structure, a linear relation between the change of the thickness of the deposited materials and the offset of the PSPhPs peak position has been observed and deduced. These findings here could provide guidance for various applications of novel micro/nano devices, such as the nano-ruler and nano-sensor.
keywords:4H-SiC  surface plasmon polaritons  nano-ruler
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Copyright:《Journal of Infrared And Millimeter Waves》