An electrical equivalent test method for thermal parameters of a diode type infrared thermal detector
Received:March 30, 2019  Revised:November 14, 2019  download
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Author NameAffiliationPostcode
LIU Chao Integrated Circuit Advanced Process R&D Center, Institute of Microelectronics of the Chinese Academy of Sciences, Beijing 100029, China
University of Chinese Academy of Sciences, Beijing 100049, China 
100049
HOU Ying Integrated Circuit Advanced Process R&D Center, Institute of Microelectronics of the Chinese Academy of Sciences, Beijing 100029, China
Wuxi Innovation Center for Internet of Things, Wuxi 214028China 
FU Jian-Yu Integrated Circuit Advanced Process R&D Center, Institute of Microelectronics of the Chinese Academy of Sciences, Beijing 100029, China
University of Chinese Academy of Sciences, Beijing 100049, China
Wuxi Innovation Center for Internet of Things, Wuxi 214028China 
LIU Rui-Wen Integrated Circuit Advanced Process R&D Center, Institute of Microelectronics of the Chinese Academy of Sciences, Beijing 100029, China 
WEI De-Bo Integrated Circuit Advanced Process R&D Center, Institute of Microelectronics of the Chinese Academy of Sciences, Beijing 100029, China
University of Chinese Academy of Sciences, Beijing 100049, China 
CHEN Da-Peng Integrated Circuit Advanced Process R&D Center, Institute of Microelectronics of the Chinese Academy of Sciences, Beijing 100029, China
University of Chinese Academy of Sciences, Beijing 100049, China
Wuxi Innovation Center for Internet of Things, Wuxi 214028China 
Abstract:Thermal parameters of infrared thermal detector include thermal capacity, thermal conductance and thermal response time, reflecting the structure information and performance of detector. Accurate and effective measurement of these thermal parameters is important for device performance evaluation and optimization. A diode-type infrared detector is an important infrared detector. Based on the self-heating effect of diode-type infrared heat detectors, an equivalent electrical test method was developed. The method has the advantages of high precision and easy implementation. The pixel of the self-made diode-type infrared focal plane array was tested by this method. The results were in good agreement with the theoretical analysis, and the feasibility of the method was verified.
keywords:infrared thermal detector  diode  electrical equivalent test  thermal parameters
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Copyright:《Journal of Infrared And Millimeter Waves》