Improved performances of 2.6 μm In0.83Ga0.17As/InP photodetectors on digitally-graded metamorphic pseudo-substrates
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State Key Laboratory of Functional Materials for Informatics,Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences

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    Abstract:

    Impacts of the total period number for the In0.83Al0.17As/In0.52Al0.48As digitally-graded metamorphic buffer (DGMB) on the performances of 2.6 μm In0.83Ga0.17As photodiodes (PDs) have been investigated. An increase of the total period number from 19 to 38 for the In0.83Al0.17As/In0.52Al0.48As DGMB with the same thickness has shown improved crystal qualities for the In0.83Ga0.17As/In0.83Al0.17As photodiode layers grown on such pseudo-substrates. An increased strain relaxation degree up to 99.8%, a reduced surface roughness, enhanced photoluminescence intensities as well as photo responsivities, and suppressed dark currents are observed simultaneously for the In0.83Ga0.17As photodiode on the DGMB with a period number of 38. These results suggest that with more periods, DGMB can restrain the transmission of the threading dislocations more efficiently and reduce the residual defect density.

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SHI Yan-Hui, MA Ying-Jie, GU Yi, CHEN Xing-You, YANG Nan-Nan, GONG Qian, ZHANG Yong-Gang. Improved performances of 2.6 μm In0.83Ga0.17As/InP photodetectors on digitally-graded metamorphic pseudo-substrates[J]. Journal of Infrared and Millimeter Waves,2019,38(3):275~280

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History
  • Received:October 24,2018
  • Revised:January 07,2019
  • Adopted:January 17,2019
  • Online: July 02,2019
  • Published: