On-wafer test structures modeling for the InP DHBTs in the frequency range of 0.1-325 GHz
Received:May 02, 2018  Revised:August 20, 2018  download
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Author NameAffiliationE-mail
XU Zhong-Chao Science and Technology on Monolithic Integrated Circuits and Modules Laboratory,Nanjing Electronic Devices Institute zhongchao_xu@163.com 
LIU Jun Key Laboratory for RF Circuits and Systems of Ministry of Education,Hangzhou Dianzi University ljun77@hdu.edu.cn 
QIAN Feng Science and Technology on Monolithic Integrated Circuits and Modules Laboratory,Nanjing Electronic Devices Institute  
LU Hai-Yan Science and Technology on Monolithic Integrated Circuits and Modules Laboratory,Nanjing Electronic Devices Institute  
CHENG Wei Science and Technology on Monolithic Integrated Circuits and Modules Laboratory,Nanjing Electronic Devices Institute  
ZHOU Wen-Yong Key Laboratory for RF Circuits and Systems of Ministry of Education,Hangzhou Dianzi University  
Abstract:The equivalent circuit models for the open and short structures used in InP DHBT on-wafer testing are presented. The model topologies are physically based. The high frequency parasitics of the structures are considered in the model topologies completely. The capacitive and resistive parasitics are extracted from the low-frequency measurements of the open structure directly. Tradition physical formulations are employed to have an initially determination of the inductive and skin effect elements of the models, and further corrected by using the analytically extracted results from the low-frequency measurements of the short structure, which enables an instance accurate formulations for the test structures modeling. The models and the modeling methodology are verified using the open and short structures manufactured at a 0.5 um InP DHBT technology, excellent agreements of the model simulated and measured results are achieved over the frequency range of 0.1-325 GHz.
keywords:InP DHBT  on-wafer test structures  modeling  0.1-325 GHz
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Copyright:《Journal of Infrared And Millimeter Waves》