25-channel 200 GHz AWG based on SOI ridge waveguides
Received:March 26, 2018  Revised:September 26, 2018  download
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Author NameAffiliationE-mail
YUAN Pei State Key Laboratory of Integrated OptoelectronicsInstitute of Semiconductors, Chinese Academy of Sciences yuanpei@semi.ac.cn 
WANG Yue Institute of Semiconductors, Chinese Academy of Science wy1022@semi.ac.cn 
WU Yuan-Da Institute of Semiconductors, Chinese Academy of Science College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences  
LIU Li-Jie Institute of Semiconductors, Chinese Academy of Science College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences  
AN Jun-Ming Institute of Semiconductors, Chinese Academy of Science College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences  
HU Xiong-Wei Institute of Semiconductors, Chinese Academy of Science  
Abstract:A SOI-based 25-channel AWG with 200 GHz channel spacing is demonstrated.The minimum distance between the input waveguides (Δxi) /output waveguides (Δxo) /arrayed waveguides (d) is optimized respectively.Then the boundary structures between the free propagation regions (FPRs) and the arrayed waveguides (W2/L2/L3) are optimized in detail.The experiment results showthat the insertion loss of the AWG is 5 ~ 7 d B, and the crosstalk of it is 13 ~ 15 dB.Compared with our previous work, the performance of AWG in this paper has been improved greatly, and further methods to improve the performances of insertion loss and crosstalk have been proposed as well.
keywords:Silicon photonics  Arrayed waveguide gratings  double-etch structure  Wavelength division multiplexing/de-multiplexer
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Copyright:《Journal of Infrared And Millimeter Waves》