1.Key Laboratory of Infrared Imaging Materials and Detectors,Shanghai Institute of Technical;2.Physics,Chinese Academy of Sciences;3.China University of Chinese;4.Academy of Sciences;5.China National Laboratory for Infrared Physics,Shanghai Institute of Technical,Chinese Academy of Sciences;6.China;7.National Laboratory for Infrared Physics
LIU Xiang-Yang, XU Guo-Qing, JIA Jia, SUN Yan, LI Xiang-Yang. Simulation of profile evolution in HgCdTe ion beam etching by the level set method[J]. Journal of Infrared and Millimeter Waves,2019,38(3):331~337
Copy