碲锌镉衬底表面在碲镉汞液相外延工艺中的热腐蚀效应
Received:July 23, 2017  Revised:August 25, 2017  点此下载全文
引用本文:宋林伟,吴 军,孔金丞,李东升,张 阳,李 沛,杨 翔,万志远,黄元晋,木 胜.碲锌镉衬底表面在碲镉汞液相外延工艺中的热腐蚀效应[J].Journal of Infrared and Millimeter Waves,2018,37(1):92~97
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Author NameAffiliationE-mail
SONG Lin-Wei Kunming Institute of Physics songlinwei0111@163.com 
WU Jun Kunming Institute of Physics  
KONG Jin-Cheng Kunming Institute of Physics kongjincheng@163.com 
LI Dong-Sheng Kunming Institute of Physics  
ZHANG Yang Kunming Institute of Physics  
LI Pei Kunming Institute of Physics  
YANG Xiang Kunming Institute of Physics  
WANG Zhi-Yuan Kunming Institute of Physics  
HUANG Yuan-Jin Kunming Institute of Physics  
MU Sheng Kunming Institute of Physics  
中文摘要:该研究以提高液相外延碲镉汞材料的质量为出发点,研究液相外延生长过程中碲锌镉衬底受到高温汞蒸气影响后的变化情况,并利用光学显微镜、白光干涉仪、能谱仪等分析测试手段对碲锌镉衬底表面进行分析.研究结果表明,液相外延生长过程中,高温汞蒸气对碲锌镉衬底中表面沉淀物尺寸无明显影响,但在衬底表面发现两种类型的腐蚀点,一种是尺寸为25 μm左右的较大腐蚀点,分布较均匀;另一种是尺寸为7 μm左右的圆形腐蚀点,分布不均匀.衬底经过液相外延薄膜成核生长前的温度变化过程以及高温Hg蒸气的作用,碲锌镉衬底表面形貌呈鱼鳞状,粗糙度增大了50%以上.
中文关键词:液相外延  碲锌镉衬底  汞腐蚀  粗糙度
 
Thermal erosion effect to CZT substrate surface during LPE growth of HgCdTe process
Abstract:Influence of Hg vapor to CZT substrate during LPE growth of HgCdTe process were studied, CZT substrates were characterized by combining with Microscope, White-light Interferometer (WLI) and Energy Dispersive Spectrometer (EDS) . Results show that the CZT substrates mainly suffered the Hg vapor during LPE process,Hg vapor has no effect on the precipitations in CZT substrates surface. Two kinds of typical Hg erosion defects are found on CZT substrates after Hg vapor treatment process. One is a kind of large defect that had size of 25 μm and distributed uniformly, while the other is smaller size of 7 μm presented nonuniform distribution. Furthermore, fish scale like surface morphology on CZT substrate is found after Hg vapor treatment process during LPE growth of HgCdTe, surface roughness increase more than 50%.
keywords:liquid phase epitaxy  CdZnTe substrate  mercury erosion  surface roughness
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