1State Key Laboratory of Materials for Integrated Circuits, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China;2Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
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Supported by the National Key R&D Program of China (2023YFB3210303), the National Natural Science Foundation of China (12333012, 62435020, 62035014, 62275258)
ZHAO Ya-Nan, WAN Wen-Jian, SHAO Di-Xiang, CAO Jun-Cheng, HAN Ying-Jun. Research on laser self-mixing interference characterization technology of terahertz blazed grating[J]. Journal of Infrared and Millimeter Waves,2026,45(2):317-324
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