Research on laser self-mixing interference characterization technology of terahertz blazed grating
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Affiliation:

1State Key Laboratory of Materials for Integrated Circuits, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China;2Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China

Clc Number:

TN2

Fund Project:

Supported by the National Key R&D Program of China (2023YFB3210303), the National Natural Science Foundation of China (12333012, 62435020, 62035014, 62275258)

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    Abstract:

    This study presents the design, fabrication, characterization, and testing methodology of a reflective blazed grating operating in the Littrow configuration. The grating, fabricated via mechanical ruling with a sawtooth profile, was characterized using a terahertz quantum cascade laser combined with self-mixing interferometry. Non-contact measurements yielded a grating constant of 84.89 μm and a blaze angle of 24.9°, with performance metrics including an angular resolution of 0.117 rad/THz and a peak diffraction efficiency of 71% within the terahertz band, consistent with theoretical predictions. By directly resolving grating parameters through laser feedback signals, this method significantly improved the measurement speed compared to conventional approaches, demonstrating the potential for real-time dynamic characterization of grating devices.

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ZHAO Ya-Nan, WAN Wen-Jian, SHAO Di-Xiang, CAO Jun-Cheng, HAN Ying-Jun. Research on laser self-mixing interference characterization technology of terahertz blazed grating[J]. Journal of Infrared and Millimeter Waves,2026,45(2):317-324

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History
  • Received:May 22,2025
  • Revised:March 11,2026
  • Adopted:July 07,2025
  • Online: March 10,2026
  • Published:
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