Research on stress adaptability of InAs/GaSb type Ⅱ superlattice long-wave focal plane infrared detectors
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1.School of Microelectronics, Shanghai University, Shanghai 201800 , China;2.Key Laboratory of Infrared Imaging Materials and Detectors, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China

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Fund Project:

the Chinese Academy of Sciences (Grant No. XDB0980000); the National Natural Science Foundation of China (62335017, 62222412, 62104236, 62104237), the Shanghai Sailing Program (Grant No. 22YF1455800, 21YF1455000), Special Innovation Program of Shanghai Institute of Technical Physics, Chinese Academy of Sciences (Grant No.CX-513, CX-567)

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    Abstract:

    The superlattice long-wavelength infrared focal plane detectors operate at low-temperatures. The differences in the thermal expansion coefficients among the various material layers of the detectors can lead to deformation and generate thermal stress, which in turn affects the optoelectrical performances of the detector. This study designed two structural modules to achieve the regulation of stress in the superlattice detectors. The changes in dark current and spectral response of InAs/GaSb type II superlattice long-wave infrared focal plane detectors under different stress conditions were explored. The research indicates that within the stress range of -10.7 MPa to 131.9 MPa, the variations in the optoelectrical performance of the detector is small. The detector was subjected to a temperature shock test, and it demonstrated high reliability. Our research results provide guidance for the structural design of InAs/GaSb type II superlattice long-wave infrared focal plane detectors and offer a basis for their performance and reliability assessment.

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History
  • Received:February 17,2025
  • Revised:March 10,2025
  • Adopted:March 17,2025
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