1.State Key Laboratory of Materials for Integrated Circuits, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China;2.University of the Chinese Academy of Sciences, Beijing 100049, China;3.School of Microelectronics, Shanghai University, Shanghai 201800, China
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Supported by the National Natural Science Foundation of China (62204250) and the Autonomous deployment project of State Key Laboratory of Materials for Integrated Circuits (SKLJC-Z2024-A05).
LIANG Kai, YUE Wen-Cheng, XU Fan, ZHU Qian-Nan, ZHANG Jian-Min, WANG Shu-Xiao, CAI Yan. Broadband high-extinction-ratio nonvolatile optical switch based on phase change material[J]. Journal of Infrared and Millimeter Waves,2026,45(1):36~41
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