Silicon valley photonic crystal Mach-Zehnder thermo -optic modulator
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1.College of physics and Optoelectronic Engineering, Taiyuan University of Technology, Taiyuan 030024, China;2.Centre for Atomaterials and Nanomanufacturing, School of Science, RMIT University, Melbourne, Victoria 3000, Australia;3.State Key Laboratory of Quantum Optics and Quantum Optics Devices, Shanxi University, Taiyuan, 030006,China

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Supported by The Basic scientific research conditions and major scientific instrument and equipment development of Anhui Science and Technology Department ( U23A20375 ) , The Natural Science Foundation of Shanxi ( 2024030212110110 ) , The Project supported by the Program of State Key Laboratory of Quantum Optics and Quantum Optics Devices ( KF202402 ) , The Key Research project of Shanxi Province ( 202302150101001 ) , The Basic scientific research conditions and major scientific instrument and equipment development of Anhui Science and Technology Department ( 2023YFF0715700 ) ,The Research project Supported by Shanxi Scholarship Council of China ( 2024-032 ) , The Fund Program for the Scientific Activities of Selected Returned Overseas Professionals in Shanxi Province ( 20240006 )

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    Abstract:

    Thermo-optic modulators are key components of optical communication systems, and their performance directly affects system efficiency. With the development of silicon optothermonic technology, silicon thermo-optic modulators have been widely used in optothermonic chips. Conventional silicon optical modulators are large in size and have high losses. In recent years, researchers have proposed to use the slow light effect of photonic crystals to reduce the footprint of modulators. Related studies have shown that these devices have advantages, such as small size and low driving voltage. However, the optical transmittance of thermo-optic modulators based on photonic crystals is still affected by defects caused by fabrication errors. Valley photonic crystal optical waveguides can achieve scattering-immune high-efficiency unidirectional transmission, providing a new venue for realizing high-performance photonic devices. In this paper, a new silicon thermo-optic modulator based on a valley photonic crystal Mach-Zehnder interferometer (MZI) is designed. The electrical heating mechanism is introduced on one of the waveguides of the MZI. The thermo-optic effect modulates the refractive index to achieve precise phase modulation of the transmitted light. The thermo-optic modulator device has a small footprint of only 9.26 μm × 7.99 μm, which can achieve a high forward transmittance of 0.91, an insertion loss of 0.41 dB, and a modulation contrast of 11.75 dB. It can also be experimentally fabricated using complementary metal oxide semiconductor (CMOS) technology, so it will have broad application prospects. This modulation principle can be widely used in designing different thermo-optic modulation devices.

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History
  • Received:November 11,2024
  • Revised:October 30,2025
  • Adopted:February 27,2025
  • Online: November 27,2025
  • Published:
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