Fabrication and characterization of InGaAs/InAlAs photoconductive terahertz detection antenna with dynamic range exceeding 75 dB
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1.State Key Laboratory of Materials for Integrated Circuits, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China;2.Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China;3.School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China

Clc Number:

TN36

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Supported by the National Natural Science Foundation of China (61927813, 62435020, 12333012)

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    Abstract:

    The photoconductive antenna is a very important device in the terahertz region and is widely used in terahertz time-domain spectroscopy technology. This article uses the molecular beam epitaxy method to grow Be-doped InGaAs/InAlAs superlattice as light absorbing materials for 1550 nm laser pumped photoconductive antenna for terahertz detection. The prepared materials have a sheet resistance greater than 106 Ω/sq and an electron mobility of 216 cm2/(V?s). The active mesa and electrode structure of the detection antenna are prepared using wet etching and magnetron sputtering processes, and the antenna chip is packaged on a PCB board. A detection antenna measurement system is built by employing a domestically produced 1550 nm femtosecond pump laser, and the detection antennas with electrode gaps of 40 μm and 60 μm are characterized. The measurement results indicate that the 60 μm antenna has a wider spectral width and power dynamic range, reaching 4.0 THz and 77.0 dB, respectively.

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JIANG Qing-Nan, TAN Zhi-Yong, WAN Wen-Jian, FU Zhang-Long, XIA Yu, LI Min, CAO Jun-Cheng. Fabrication and characterization of InGaAs/InAlAs photoconductive terahertz detection antenna with dynamic range exceeding 75 dB[J]. Journal of Infrared and Millimeter Waves,2025,44(4):562~568

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History
  • Received:October 28,2024
  • Revised:May 15,2025
  • Adopted:December 09,2024
  • Online: May 12,2025
  • Published:
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