Fabrication and characterization of InGaAs/InAlAs photoconductive terahertz detection antenna with dynamic range exceeding 75 dB
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Affiliation:

1.State Key Laboratory of Materials for Integrated Circuits, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China;2.Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China;3.School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China

Clc Number:

TN36

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Supported by the National Natural Science Foundation of China (61927813,62435020,12333012)

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    Abstract:

    The photoconductive antenna is a very important device in the terahertz region and is widely used in terahertz time-domain spectroscopy technology. This article uses the molecular beam epitaxy method to grow Be-doped InGaAs/InAlAs superlattice as light absorbing materials for 1 550 nm laser pumped photoconductive antenna for terahertz detection. The prepared materials have a sheet resistance greater than 106 Ω/sq and an electron mobility of 216 cm2/(V?s). The active mesa and electrode structure of the detection antenna are prepared using wet etching and magnetron sputtering processes, and the antenna chip is packaged on a PCB board. A detection antenna measurement system is built by employing a domestically produced 1 550 nm femtosecond pump laser, and the detection antennas with electrode gaps of 40 μm and 60 μm are characterized. The measurement results indicate that the 60 μm antenna has a wider spectral width and power dynamic range, reaching 4.0 THz and 77.0 dB, respectively.

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JIANG Qing-Nan, TAN Zhi-Yong, WAN Wen-Jian, FU Zhang-Long, XIA Yu, LI Min, CAO Jun-Cheng. Fabrication and characterization of InGaAs/InAlAs photoconductive terahertz detection antenna with dynamic range exceeding 75 dB[J]. Journal of Infrared and Millimeter Waves,2025,44(4):562~568

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History
  • Received:October 28,2024
  • Revised:May 15,2025
  • Adopted:December 09,2024
  • Online: May 12,2025
  • Published:
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