Research on the punch-through phenomenon of separate absorption, charge and multiplication avalanche photodetectors
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1.Key Laboratory of Optoelectronics Technology of Ministry of Education, School of Information Science and Technology, Beijing University of Technology, Beijing 100124, China;2.Institute of Advanced Semiconductor Optoelectronic Technology, School of Physics and Optoelectronic Engineering, Beijing University of Technology, Beijing 100124, China

Clc Number:

TN364+.2

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Supported by the National Natural Science Foundation of China (62375008); the National Key Research and Development Program of China (2021FYB2206500); the CAS Project for Young Scientists in Basic Research (YSBR-056); the CAS Key Research Program of Frontier Sciences (ZDBS-LY-JSC008)

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    Abstract:

    This paper investigates the punch-through characteristics of separate absorption, charge and multiplication avalanche photodetector (SACM APD). By analyzing the device''s spectral response, capacitance characteristics, and I-V characteristics at various operating temperatures, and combining these with simulated internal electric field and energy band distributions from the SILVACO platform, we analyzed examined the performance of the SACM APD before and after punch-through and established a corresponding mathematical model. Through structural and process parameter optimization for silicon-based SACM APD devices, simulations revealed that when the ion implantation energy of the field-control layer was 580 keV, the optimized device exhibited a punch-through threshold voltage of -30 V and a capacitance reduction to one-third of the pre-punch-through value. Subsequently, a silicon SACM APD device was fabricated using the complementary metal-oxide-semiconductor (CMOS) process. Measurements confirmed a punch-through threshold voltage of -30 V, a 2.18-fold increase in photocurrent at 808 nm (punch-through), a redshift of the peak responsivity wavelength from 590 nm (pre-punch-through) to 820 nm (post-punch-through), and an elevation of the peak responsivity from 0.171 A/W@590 nm to 0.377 A/W@820 nm. The capacitance was also reduced to one-third of the pre-punch-through value at 1 MHz.

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LI Chong, MA Zi-Yi, YANG Shuai, LIU Yue-Wen, WANG Jia-Xuan, LIU Yun-Fei, DONG Yu-Sen, LI Zi-Qian, LIU Dian-Bo. Research on the punch-through phenomenon of separate absorption, charge and multiplication avalanche photodetectors[J]. Journal of Infrared and Millimeter Waves,2025,44(3):327~334

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History
  • Received:September 10,2024
  • Revised:March 24,2025
  • Adopted:October 29,2024
  • Online: March 17,2025
  • Published:
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