Correlation between the whole small recess offset and electrical performance of InP-based HEMTs
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1.High-Frequency High-Voltage Device and Integrated Circuits Center, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China;2.University of Chinese Academy of Sciences (UCAS), Beijing 100049, China

Clc Number:

TN385

Fund Project:

Supported by the Terahertz Multi User RF Transceiver System Development Project (Z211100004421012).

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    Abstract:

    In this work, we investigate the impact of the whole small recess offset on DC and RF characteristics of InP high electron mobility transistors (HEMTs). Lg = 80 nm HEMTs are fabricated with a double-recessed gate process. We focus on their DC and RF responses, including the maximum transconductance (gm_max), ON-resistance (RON), current-gain cutoff frequency (fT), and maximum oscillation frequency (fmax). The devices have almost same RON. The gm_max improves as the whole small recess moves toward the source. However, a small gate to source capacitance (Cgs) and a small drain output conductance (gds) lead to the largest fT, although the whole small gate recess moves toward the drain leads to the smaller gm_max. According to the small-signal modeling, the device with the whole small recess toward drain exhibits an excellent RF characteristics, such as fT = 372 GHz and fmax = 394 GHz. This result is achieved by paying attention to adjust resistive and capacitive parasitics, which play a key role in high-frequency response.

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GONG Hang, ZHOU Fu-Gui, FENG Ruize, FENG Zhi-Yu, LIU Tong, SHI Jing-Yuan, SU Yong-Bo, JIN Zhi. Correlation between the whole small recess offset and electrical performance of InP-based HEMTs[J]. Journal of Infrared and Millimeter Waves,2025,44(1):16~21

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History
  • Received:March 05,2024
  • Revised:August 05,2024
  • Adopted:April 23,2024
  • Online: November 09,2024
  • Published:
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