Ion implantation process and lattice damage mechanism of boron doped crystalline germanium
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1.State Key Laboratory of Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China;2.University of Chinese Academy of Sciences, Beijing 100049, China;3.College of Physics and Optoelectronic Engineering, Hangzhou Institute for Advanced Study, University of Chinese Academy of Sciences, Hangzhou 310024, China;4.Zhejiang Laboratory, Hangzhou 311100, China;5.School of Physical Science and Technology, ShanghaiTech University, Shanghai 201210, China

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TN3

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Supported by National Key R&D Program of China(2023YFA1608701), National Natural Science Foundation of China(62274168, 11933006, U2141240), and Hangzhou Leading Innovation and Entrepreneurship Team (TD2020002)

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    Abstract:

    The response wavelength of the blocked-impurity-band (BIB) structured infrared detector can reach 200 μm, which is the most important very long wavelength infrared astronomical detector. The ion implantation method greatly simplifies the fabrication process of the device, but it is easy to cause lattice damage, introduce crystalline defects, and lead to the increase of the dark current of detectors. Herein, the boron-doped germanium ion implantation process was studied, and the involved lattice damage mechanism was discussed. Experimental conditions involved using 80 keV energy for boron ion implantation, with doses ranging from 11013 cm-2 to 31015 cm-2. After implantation, thermal annealing at 450 ℃ was implemented to optimize dopant activation and mitigate the effects of ion implantation. Various sophisticated characterization techniques, including X-ray diffraction (XRD), Raman spectroscopy, X-ray photoelectron spectroscopy (XPS), and secondary ion mass spectrometry (SIMS) were used to clarify lattice damage. At lower doses, no notable structural alterations were observed. However, as the dosage increased, specific micro distortions became apparent, which could be attributed to point defects and residual strain. The created lattice damage was recovered by thermal treatment, however, an irreversible strain induced by implantation still existed at heavily dosed samples.

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HABIBA Um E, CHEN Tian-Ye, LIU Chi-Xian, DOU Wei, LIU Xiao-Yan, LING Jing-Wei, PAN Chang-Yi, WANG Peng, DENG Hui-Yong, SHEN Hong, DAI Ning. Ion implantation process and lattice damage mechanism of boron doped crystalline germanium[J]. Journal of Infrared and Millimeter Waves,2024,43(6):749~754

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History
  • Received:February 01,2024
  • Revised:November 06,2024
  • Adopted:March 12,2024
  • Online: November 06,2024
  • Published:
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