Cavity-type metasurface uncooled infrared detector
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Kunming Institute of Physics, Kunming 650223, China

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O623;TN214

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    Abstract:

    As the cell size of uncooled infrared (IR) detectors progressively shrinks, it becomes increasingly important to increase detector absorption. here, an IMIAM (Insulator-Metal-Insulator-Air-Metal) cavity type metasurface uncooled IR detector structure is proposed, which effectively improves the uniformity of the photosensitive layer while enhancing the absorption of the detector. Utilizing systematic simulation and optimization, it has achieved almost perfect absorption in the Long Wavelength Infrared range (8~14 μm), meanwhile, it also shows excellent absorption performance in Mid Wavelength Infrared band. In this paper, the reliability of the structure is also verified by the process. this research may provide alternatives for optimizing conventional uncooled IR detectors

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YANG Jun, YANG Chun-Li, FANG Hui, YUAN Jun, YAN Shan-Ru, LI Hua-Ying, LI Bing-Zhe. Cavity-type metasurface uncooled infrared detector[J]. Journal of Infrared and Millimeter Waves,2024,43(5):621~627

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History
  • Received:January 29,2024
  • Revised:August 04,2024
  • Adopted:March 12,2024
  • Online: August 02,2024
  • Published: October 25,2024
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