Long Wavelength Infrared Metalens Fabricated by Photolithography
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1.School of Physical Science and Technology,ShanghaiTech University;2.Shanghai Normal University;3.State Key Laboratory of Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences;4.State Key Laboratory of Infrared Physics,Shanghai Institute of Technical Physics,Chinese Academy of Sciences;5.China;6.Department of Physics,Shanghai Normal University;7.Northwestern Polytechnical University,Xi’an;8.Shanghai Institute of Technical Physics,Chinese Academy of Sciences;9.Department of Physics, Shanghai Normal University

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The National Key Technologies R&D Program of China,National Natural Science Foundation of China,Shanghai Municipal Science and Technology Major Project,Chinese Academy of Sciences President's International Fellowship Initiative

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    Abstract:

    Metasurfaces in the long wave infrared (LWIR) spectrum hold great potential for applications in thermal imaging, atmospheric remote sensing, and target identification, among others. In this study, we designed and experimentally demonstrated a 4 mm size, all-silicon metasurface metalens with large depth of focus operational across a broadband range from 9 μm to 11.5 μm. The experimental results confirm effective focusing and imaging capabilities of the metalens in LWIR region, thus paving the way for practical LWIR applications of metalens technology.

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History
  • Received:December 07,2023
  • Revised:March 06,2024
  • Adopted:March 12,2024
  • Online:
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