Structural design of mid-infrared waveguide detectors based on InAs/GaAsSb superlattice
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1.Hangzhou Institute for Advanced Study, University of Chinese Academy of Sciences;2.Hangzhou Institute for Advanced Study, University of Chinese Academy of Sciences,Key Laboratory of Infrared Imaging Materials and Detectors, Shanghai Institute of Technical Physics, Chinese Academy of Sciences

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Fund Project:

National Natural Science Foundation of China(NSFC) (61904183, 61974152, 62104237, 62004205), the Youth Innovation Promotion Association of the Chinese Academy of Sciences(Y202057), Shanghai Science and Technology Committee Rising-Star Program(20QA1410500), Shanghai Sail Plans(21YF1455000)

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    Abstract:

    In the near-infrared, spectroscopic detection of molecules has been achieved using on-chip waveguides and resonators. However, in the mid-infrared band, many sensors still rely on off-chip light sources and detectors, which limit the integration and sensitivity of chemical sensing chips. Here, we demonstrate an InAs/GaAsSb superlattice mid-infrared waveguide integrated detector. The GaAsSb waveguide layer and the InAs/GaAsSb superlattice absorbing layer are coupled via the evanescent coupling, enabling low-loss and high-performance mid-infrared light detection. We simulated the photoelectricity characteristics of the device, analyzed the factors influencing the integration of the InAs/GaAsSb superlattice photodetector and the GaAsSb waveguide. Optimal thicknesses and lengths for the absorption layer are determined. With minimal noise equivalent power, the quantum efficiency can reach 68.9%. The waveguide detector based on Ⅲ-V materials is easier to integrate mid-infrared light source and realize the on-chip photoelectric detection chip.

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History
  • Received:October 20,2023
  • Revised:November 16,2023
  • Adopted:December 01,2023
  • Online:
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