1.State Key Laboratory of Photovoltaic Science and Technology, Shanghai Frontiers Science Research Base of Intelligent Optoelectronics and Perception, Institute of Optoelectronics, Fudan University, Shanghai 200433, China;2.State Key Laboratory of Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China
TN215
Supported by the National Natural Science Foundation of China (NSFC 62105100), the National Key research and development program in the 14th five year plan (2021YFA1200700)
HOU Zhi-Jin, CHEN Yan, WANG Xu-Dong, WANG Jian-Lu, CHU Jun-Hao. A novel self-alignment method for high precision silicon diffraction microlens arrays preparation and its integration with infrared focal plane arrays[J]. Journal of Infrared and Millimeter Waves,2024,43(5):589~594
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