1.School of Integrated Circuits, University of Chinese Academy of Sciences, Beijing 100049, China;2.Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China;3.Engineering Research Center for Semiconductor Integrated Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China;4.School of Microelectronics, University of Science and Technology of China, Hefei 230026, China;5.Research Center, HuBei Jiufengshan Laboratory, Wuhan 430074, China
TN386
Supported by the National Natural Science Foundation of China (61971395)
KANG Ya-Ru, DONG Hui, LIU Jing, HUANG Zhen, LI Zhao-Feng, YAN Wei, WANG Xiao-Dong. The physical model, structural fabrication, and DC testing of lateral gate transistor terahertz detectors[J]. Journal of Infrared and Millimeter Waves,2024,43(4):526~532
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