12.5μm 1024×1024 long-wavelength infrared InAs/GaSb Type II superlattice focal plane arrays
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Shanghai Institute of Technical Physics, Chinese Academy of Sciences,Shanghai 200083,China

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    Abstract:

    In this paper, we report research results of 12.5μm long-wavelength infrared InAs/GaSb superlattice focal plane arrays. The superlattice structure was grown on GaSb substrate using molecular beam epitaxy ( MBE) technology. The respective structure of absorption region is 15ML ( InAs) /7ML ( GaSb). The detector adopts PBπBN double barrier structure to suppress the dark current. A long-wave focal plane detector with the size of 1024×1024 and the pixel center-to-center distance of 18×18μm was developed. The detector is packaged by a metal dewar, and a superlattice long-wavelength detector cryocooler assembly is formed by coupling with a refrigerator. At 60 K measurement, the detector has 50% cut-off wavelength of 12.5μm, The detector has a peak detectivity of 6.6×1010cmHz1/2W-1 , dead pixels rate of 1.05% and a noise equivalent temperature difference (NETD) is 21.2mK. Infrared images of this detector has been taken using infrared imaging test.

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History
  • Received:September 19,2023
  • Revised:July 18,2024
  • Adopted:September 27,2023
  • Online: July 11,2024
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