Research on polarization control of MOPA semiconductor laser
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1.The Key Laboratory of Science and Technology on High Energy Laser, China Academy of Engineering Physics, Mianyang 621900, China;2.Institute of Applied Electronics, China Academy of Engineering Physics, Mianyang 621900, China;3.Institute of Semiconductor, Chinese Academy of Sciences, Beijing 100083, China

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O43

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    Abstract:

    The master oscillator power amplifier (MOPA) laser is receiving increasing attention due to its ability to achieve high power and beam quality output. In order to improve the polarization degree of MOPA laser and reduce the efficiency loss during polarization combining, InGaAs/AlGaAs compressive single quantum well was used in the active region. The optical confinement factor of TE-mode in ridge waveguide was improved by 1.35 μm deep etching, whereas the TE optical gain in tapered amplifier was increased through on-chip metal stress regulation. Combining the two schemes not only improves the degrees of polarization (DOP) of two sections, but also reduces the polarization angle difference. Finally, 11 W@15 A continuous output and over 90% DOP of the MOPA have been achieved by standard process fabrication.

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WANG Hao-Miao, HE Yu-Wen, LI Yi, HU Yao, ZHANG Liang, DU Wei-Chuan, GAO Song-Xin, TANG Chun, MA Xiao-Yu, LIU Su-Ping. Research on polarization control of MOPA semiconductor laser[J]. Journal of Infrared and Millimeter Waves,2024,43(6):762~767

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History
  • Received:August 29,2023
  • Revised:November 12,2024
  • Adopted:September 27,2023
  • Online: November 12,2024
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