InGaAs/InAlAs InP-based HEMT with the current cutoff frequency of 441 GHz
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Affiliation:

1.High-Frequency High-Voltage Device and Integrated Circuits Center, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China;2.School of Integrated Circuits, University of Chinese Academy of Sciences, Beijing 100049, China

Clc Number:

TN385

Fund Project:

Supported by The National Natural Science Foundation of China (61434006)

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    Abstract:

    In this letter, an In0.53Ga0.47As/In0.52Al0.48As InP-based HEMT with fT > 400 GHz was designed and fabricated successfully. A narrow gate recess technology was used to optimize the parasitic resistances. The gate length is 54.4 nm, and the gate width is 2 × 50 μm. The maximum drain current IDS.max is 957 mA/mm, and the maximum transconductance gm.max is 1 265 mS/mm. The current gain cutoff frequency fT is as high as 441 GHz and the maximum oscillation frequency fmax reaches 299 GHz, even at a relatively small value of VDS = 0.7 V. The reported device can be applied to terahertz monolithic integrated amplifiers and other circuits.

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FENG Rui-Ze, CAO Shu-Rui, FENG Zhi-Yu, ZHOU Fu-Gui, LIU Tong, SU Yong-Bo, JIN Zhi. InGaAs/InAlAs InP-based HEMT with the current cutoff frequency of 441 GHz[J]. Journal of Infrared and Millimeter Waves,2024,43(3):331~335

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History
  • Received:April 13,2023
  • Revised:April 24,2024
  • Adopted:June 01,2023
  • Online: April 23,2024
  • Published: