A novel ring-shaped top-DBR etched microstructure VCSEL with a hollow beam
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Affiliation:

State Key Lab on High Power Semiconductor Lasers, Changchun University of Science and Technology, Changchun 130000, China

Clc Number:

TN248.4

Fund Project:

Supported by Jilin Province Science and Technology Department project (20220101122JC); Changchun University of Science and Technology project (627011102).

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    Abstract:

    The structure of a novel ring-shaped top-DBR etched microstructure VCSEL with a proton implantation high resistance region was designed. A ring column structure was formed from the upper electrode to the active region, which directly generated a hollow laser beam output. The optical field distribution of the etched microstructure VCSEL was calculated by FDTD software, and the obtained ring-shaped patterns maintained the hollow beam characteristics under the different mode numbers. We fabricated the etched microstructure VCSEL with a lasing wavelength of 848 nm at room temperature and investigated its performance. The threshold current was 0.27 A and the peak power was up to 170 mW. The near-field patterns of different currents clearly displayed hollow ring-shaped spots. The distribution curves of far-field light intensity matched the characteristics of a hollow beam as well. This novel VCSEL provides a new approach for the development of hollow beams and even array devices.

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PANG Chao, YAN Chang-Ling, YANG Jing-Hang, QIAN Ran, LI Yi-Fei. A novel ring-shaped top-DBR etched microstructure VCSEL with a hollow beam[J]. Journal of Infrared and Millimeter Waves,2023,42(4):462~467

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History
  • Received:November 24,2022
  • Revised:June 05,2023
  • Adopted:February 02,2023
  • Online: June 02,2023
  • Published: