Liquid Phase Epitaxy (LPE) growth of the room-temperature InAs-based mid-infrared photodetector
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1.School of Materials and Chemistry, University of Shanghai for Science and Technology, Shanghai 200093, China;2.Shanghai Institute of Technical Physics of the Chinese Academy of Sciences, Shanghai 200083, China;3.Zhejiang Lab, Hangzhou 311100, China;4.Hangzhou Institute for Advanced Study, University of Chinese Academy of Sciences, Hangzhou 310024, China

Clc Number:

O78

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Supported by the National Natural Science Foundation of China (11933006), the Frontier Science Research Project (Key Programs) of the Chinese Academy of Sciences (QYZDJ-SSW-SLH018), the National Natural Science Foundation of China (U2141240)

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    Abstract:

    The material quality is very important to obtain the high performance infrared detector. It is presented that the key issue of the material quality is to control the lattice mismatch between the layers of the device architecture. The effects of the lattice mismatch on the material quality and the dark current characteristics were reported. In the InAs/InAsSbP system grown by LPE technology, there is an appropriate value for the lattice mismatch between InAsSbP and InAs. If the lattice mismatch deviates from this value, no matter whether it is smaller or larger, the material quality will deteriorate. Then it was stated how to adjust growth parameters to obtain the appropriate lattice mismatch. The infrared detector made from the device architecture with the appropriate lattice mismatch was fabricated, and the room-temperature peak detectivity of this detector is 6.8×109 cm Hz1/2W-1 at zero bias, which is comparable with that of international commercial InAs photodetectors.

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CHEN Ze-Zhong, DUAN Yong-Fei, LIN Hong-Yu, ZHANG Zhen-Yu, XIE Hao, SUN Yan, HU Shu-Hong, DAI Ning. Liquid Phase Epitaxy (LPE) growth of the room-temperature InAs-based mid-infrared photodetector[J]. Journal of Infrared and Millimeter Waves,2023,42(3):306~310

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History
  • Received:October 13,2022
  • Revised:April 23,2023
  • Adopted:November 17,2022
  • Online: March 30,2023
  • Published:
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