Characterization of electrical parameters of high-purity quartz glass in the 40-110 GHz frequency band
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1.University of Electronic Science and Technology of China, Chengdu 611731, China;2.Microsystem & Terahertz Research Center, China Academy of Engineering Physics, Chengdu 610200, China;3.Key Laboratory of Testing Technology for Manufacturing Process, Southwest University of Science and Technology, Mianyang 621010, China

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TN817;TN815

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    Abstract:

    The transmission line structures such as coplanar waveguide (CPW) and microstrip ring resonator (MRR) were designed on a high-purity quartz substrate (99.9997%) with a thickness of 127 μm. The average insertion loss for the CPW line varied from 0.096 to 0.176 dB/mm in the frequency range of 40-110 GHz. Furthermore, the relative permittivity and loss tangent of the quartz were extracted by the MRR method. The relative permittivity of the quartz substrate in the V-band and W-band ranged with 3.7-3.85 and 3.85-4, respectively. The loss tangent value was approximately 0.004 in the V-band and 0.004-0.006 in the W-band. The performance comparison with other substrates shows that this high-purity quartz has excellent and stable electrical properties and its potential for designing high-performance passive and packaging structures.

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ZHU Xiang-Bao, SUN Xu, YUE Hai-Kun, QIAN Ling-Xuan, NI Lei. Characterization of electrical parameters of high-purity quartz glass in the 40-110 GHz frequency band[J]. Journal of Infrared and Millimeter Waves,2023,42(4):490~496

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History
  • Received:September 28,2022
  • Revised:June 05,2023
  • Adopted:February 28,2023
  • Online: June 02,2023
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