Planar wavelength-extended In0.75Ga0.25As detector with 2.2-μm cut-off wavelength

1.State Key Laboratories of Transducer Technology, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China;2.Key Laboratory of Infrared Imaging Materials and Detectors, Chinese Academy of Sciences, Shanghai 200083, China;3.University of the Chinese Academy of Sciences, Beijing 100049, China

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Supported by the Program of Shanghai Academic/Technology Research Leader under Grant (21XD1404200),Key deployment projects of the Chinese Academy of Sciences(ZDRW-CN-2019-3),Joint fund of Chinese Academy of Sciences(6141A01170106),the Shanghai Municipal Science and Technology Major Project(2019SHZDZX01) and the National Natural Science Foundation of China(62075229,62175250)

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    Planar-type 2.2 μm wavelength-extended InGaAs photodetectors (PDs) using the sealed-ampoule diffusion method was reported. The zinc arsenide powder was used as the dopant source, which was driven into the cap of the In0.75Al0.25As/In0.75Ga0.25As/In0.75Al0.25As hetero structure materials grown by molecular beam epitaxy (MBE), using a SiNx as diffusion mask deposited by ICP-CVD. The junction depth, the lateral collection width of photogenerated carriers, the I-V characteristics, the spectral response and the detectivity of the detector at different temperatures were analyzed. The results indicate that the PD exhibits a low dark current density of 0.69×10-9 A/cm2 at -10 mV at 150 K. The cutoff wavelength and peak wavelength were 2.12 μm and 1.97 μm. The peak detectivity, peak responsivity and quantum efficiency was 1.01×1012 cm·Hz1/2/W, 1.29 A/W and 82% respectively. These results suggest that the planar-type InGaAs can reach high performance.

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CHENG Ji-Feng, LI Xue, SHAO Xiu-Mei, LI Tao, WANG Hong-Zhen, MA Ying-Jie, YANG Bo, GONG Hai-Mei. Planar wavelength-extended In0.75Ga0.25As detector with 2.2-μm cut-off wavelength[J]. Journal of Infrared and Millimeter Waves,2022,41(5):804~809

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  • Received:February 16,2022
  • Revised:July 21,2022
  • Adopted:April 27,2022
  • Online: September 05,2022
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