In this paper, the one-port he two-port measurement methods for millimeter wave Schottky diodes are developed, and the corresponding test structures are designed. The variation of cut-off frequency with parasitic resistance and zero bias intrinsic capacitance are analyzed. The equivalent circuit models of small signal and large signal are given. A commercial Schottky diode has used to extract the small signal model parameters. The experimental results show that the S-parameters agree well under on and off bias condition.