Recent advances in short wavelength infrared InGaAs focal plane arrays
Author:
Affiliation:

1.State Key Laboratories of Transducer Technology, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China;2.Key Laboratory of Infrared Imaging Materials and Detectors, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China

Clc Number:

TN215

Fund Project:

Supported by the National Natural Science Foundation of China (62175250, 62075229 and 62104238) ; the Shanghai Municipal Science and Technology Major Project (2019SHZDZX01); the Program of Shanghai Academic Research Leader (21XD1404200); the International Science and Technology Cooperation Program of Shanghai (20520711200).

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    Abstract:

    To meet with the ongoing demand for the development of higher performance space remote sensing instruments, a series of progress in short wavelength infrared InGaAs focal plane arrays (FPAs) has been achieved in Shanghai Institute of Technical Physics. Through the continuous research efforts devoted to the low-defect density epitaxial materials, the FPA processing technologies as well as the low noise read-out circuits, a 10-μm-pitch 1~1.7 μm InGaAs FPA with an array format up to 2560×2048, a pixel operability up to 99.7% and a high peak detectivity up to 1.1×1013 cmHz1/2/W is realized. A 15-μm-pitch 1~2.5 μm extended wavelength InGaAs FPA with an array format of 1280×1024 and a high peak detectivity up to 5.0×1011 cmHz1/2/W is also achieved. New principle FPA detectors are also developed, which are a monolithic integrated four-direction polarized 160×128 InGaAs FPA with a high extinction ratio up to 37:1, and a 64×64 InGaAs Geiger-mode avalanche FPA with a fine timing resolution down to 0.8 ns.

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LI Xue, GONG Hai-Mei, SHAO Xiu-Mei, LI Tao, HUANG Song-Lei, MA Ying-Jie, YANG Bo, ZHU Xian-Liang, GU Yi, FANG Jia-Xiong. Recent advances in short wavelength infrared InGaAs focal plane arrays[J]. Journal of Infrared and Millimeter Waves,2022,41(1):129~138

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History
  • Received:January 01,2022
  • Revised:January 11,2022
  • Adopted:January 12,2022
  • Online: January 23,2022
  • Published: