1.Terahertz Science and Technology Research Center， University of Electronic Science and Technology of China， Chengdu 610054， China;2.Key Laboratory of Terahertz Technology， Ministry of Education， Chengdu 610054， China;3.National Key Laboratory of Science and Technology on Vacuum Electronics， University of Electronic Science and Technology of China， Chengdu 610054， China
supported by the National Key Research and Development Program of China under Grant 2017YFA0701000， 2020YFA0714001 and 2018YFF01013001，the Natural Science Foundation of China under Grant 61988102， 61921002 and 62071108，the Fundamental Research Funds for the Central Universities under Grant ZYGX2020ZB007； and the fund of Key Laboratory of THz Technology， Ministry of Education， China
The terahertz wave has great potential in deep space exploration， nondestructive testing， communication and security inspection because of its characteristics of electronics and photonics. The rapid development of terahertz technology in recent years is inseparable from the continuous progress of terahertz vacuum electronic devices. Due to the size sharing effect and the limitation of electron beam emission performance， this type of device has encountered considerable difficulty in the process of higher frequency bands. To solve these problems， a series of measures have been taken， such as improving high-frequency structure， controlling machining accuracy， preparing materials with better performance and more accurate calculation methods. This paper introduces the solutions and the latest progress of several mainstream miniaturized terahertz devices， and finally summarizes the problems and solutions that may be encountered in the future according to the current development situation.
CHANG Shao-Jie, WU Zhen-Hua, HUANG Jie, ZHAO Tao, LIU Di-Wei, HU Min, WEI Yan-Yu, GONG Yu-Bin, LIU Sheng-Gang. The research progress of vacuum electron device in terahertz band[J]. Journal of Infrared and Millimeter Waves,2022,41(1):87~104Copy