1.Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China;2.University of Chinese Academy of Sciences, Beijing 100049, China;3.School of Information Science and Technology, ShanghaiTech University, Shanghai 201210, China;4.Nantong Academy of Intelligent Sensing, Nantong 226000, China
TN364
Supported by the Shanghai Pujiang Program (18PJ1410700), Key Laboratory of Defense Technology Funding of Chinese Academy of Sciences (CXJJ-20S004), and Innovation Program of Shanghai Institute of Technical Physics, Chinese Academy of Sciences (CX-268)
JU Guo-Hao, CHENG Zheng-Xi, CHEN Yong-Ping. Lateral linear mode avalanche photodiode through 0.35 μm high voltage CMOS process[J]. Journal of Infrared and Millimeter Waves,2022,41(4):668~671
Copy