Influence of oxygen partial pressure on the optical properties of β-Ga2O3-δ films deposited by pulsed laser deposition

1.Technical Center for Multifunctional Magneto-Optical Spectroscopy (Shanghai), Engineering Research Center of Nanophotonics & Advanced Instrument (Ministry of Education), Department of Materials, School of Physics and Electronic Science, East China Normal University, Shanghai 200241, China;2.Collaborative Innovation Center of Extreme Optics, Shanxi University, Taiyuan 030006, China;3.Shanghai Institute of Intelligent Electronics & Systems, Fudan University, Shanghai 200433, China

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Supported by the National Key R&D Program of China ( 2018YFB0406500 and 2019YFB2203400); the Natural Science Foundation of China (91833303, 61974043, 62074058, 62090013 and 61974044); Projects of Science and Technology Commission of Shanghai Municipality ( 18JC1412400, 18YF1407200, 18YF1407000 and 19511120100); the Program for Professor of Special Appointment (Eastern Scholar) at Shanghai Institutions of Higher Learning and Shanghai Pujiang Program (20PJ1403600).

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    High quality β-Ga2O3-δ films on c-sapphire substrates are deposited by pulsed laser deposition (PLD) under various oxygen partial pressures. The crystalline structure, chemometry and optical properties of the β-Ga2O3-δ films are investigated systematically by X-ray diffraction (XRD), far-infrared reflectance spectra, X-ray photoelectron spectroscopy (XPS) and ultraviolet-visible-near infrared (UV-vis-NIR) transmittance spectra. The XRD analysis shows that all the as-deposited films are of unique (-201) orientation. The transmittance spectra reveal that the films exhibit a high transparency above 80% in the UV-vis-NIR wavelength region above 255 nm (4.863 eV). Moreover, the optical constants and optical direct bandgap are extracted based on the transmittance spectra with Tauc-Lorentz (TL) dispersion function model and Tauc’s relationship, respectively. A further step, the influence of oxygen partial pressure on optical properties is explained by theoretical calculation.

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LI Liu-Meng, ZHOU Bin, GAO Li-Chen, JIANG Kai, ZHU Liang-Qing, ZHANG Jin-Zhong, HU Zhi-Gao, CHU Jun-Hao. Influence of oxygen partial pressure on the optical properties of β-Ga2O3-δ films deposited by pulsed laser deposition[J]. Journal of Infrared and Millimeter Waves,2022,41(1):242~247

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  • Received:July 06,2021
  • Revised:January 17,2022
  • Adopted:October 20,2021
  • Online: January 17,2022
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