1.Laboratory of Silicon-Based Materials and Integrated Devices， Shanghai Institute of Microsystem and Information Technology， Chinese Academy of Sciences， Shanghai 200050， China;2.University of Chinese Academy of Sciences， Beijing 100049， China;3.Department of Electronic Engineering， Xi’an University of Technology， Xi’an 710048， China;4.Shanghai Industrial μTechnology Research Institute， Shanghai 201800， China
Supported by National Key Research and Development Program of China （2019YFB2203502）， Shanghai Sailing Program （20YF1456900）， Strategic Pioneer Research Projects of Defense Science and Technology （XDB43020500）， and National Outstanding Youth Foundation of China （61904185）
Due to metallic ohmic loss， plasmonic waveguides usually have larger propagation loss. Here， an all-dielectric antislot waveguide was proposed， which can realize subwavelength mode confinement and theoretically lossless propagation simultaneously. A normalized mode area of 3.4×10-2 was achieved in the all-dielectric antislot waveguide. Moreover， an efficient coupling scheme between the small-size antislot waveguide and input/output fiber was proposed. An overall coupling efficiency of 92.7% was attained. The misalignment tolerance for 1 dB loss penalty was about 2 μm in both y and z directions.
YUE Wen-Cheng, WANG Qing, LI Xin-Yu, WANG Shu-Xiao, YU Ming-Bin. All-dielectric antislot waveguide with subwavelength mode confinement and its high-efficiency coupling with input/output fiber[J]. Journal of Infrared and Millimeter Waves,2021,40(6):709~714Copy