1.Key Laboratory of Infrared Imaging Materials and Detectors, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China;2.University of Chinese Academy of Sciences, Beijing 100049, China
TN304.2;TN305
Supported by National Key Research and Development Program of China (2016YFB0402403), National Natural Science Foundation of China (61974152, 61904183, 61534006), the Youth Innovation Promotion Association(2016219), Shanghai Rising-Star Program (20QA141500).
CUI Yu-Rong, XU Zhi-Cheng, HUANG Min, XU Jia-Jia, CHEN Jian-Xin, HE Li. Fabrication and characteristics of InAs/GaSb Type-II superlattice infrared detector pixel mesas[J]. Journal of Infrared and Millimeter Waves,2021,40(4):427~431
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