1.Key Laboratory of Infrared Imaging Materials and Detectors， Shanghai Institute of Technical Physics， Chinese Academy of Sciences， Shanghai 200083， China;2.University of Chinese Academy of Science， Beijing 100049， China
Supported by the National Natural Science Foundation of China （61974152， 61904183， 62222412， 62004205， 62104237）
In this work， the surface treatment of InAs/GaSb type-II super-lattice long-wavelength infrared detectors is studied. An optimizing process of N2O plasma treatment and rapid thermal annealing was developed， which can improve the performance of long-wavelength detector with λ50% ?cut-off=12.3 μm from 5.88×10-1 A/cm2 to 4.09×10-2 A/cm2 at liquid nitrogen temperature， -0.05 V bias. Through variable area device array characterization， the sidewall leakage current was extracted. Under zero bias， the surface resistivity improved from 17.9 Ωcm to 297.6 Ωcm. However， the sidewall leakage couldn’t be ignored under large inverse bias after optimizing process， where surface charge might induce the surface tunneling current. It is verified by gate-control structure that there are two main leakage mechanisms in long-wave device： pure sidewall parallel resistance and surface tunneling. At last， the surface charge was calculated to be 3.72×1011 cm-2 by IV curve fitting after optimizing process.
CUI Yu-Rong, ZHOU Yi, HUANG Min, WANG Fang-Fang, XU Zhi-Cheng, XU Jia-Jia, CHEN Jian-Xin, HE Li. Studies on the surface treatment of InAs/GaSb type-II super-lattice long-wave infrared detectors[J]. Journal of Infrared and Millimeter Waves,2023,42(1):8~13Copy