1.North University of China， Key Laboratory of Instrumentation Science & Dynamic Measurement， Ministry of Education， Shanxi Provincial Key Laboratory of Dynamic Testing Technology， Taiyuan 030051， China;2.Institute of Microelectronics of Chinese Academy of Sciences， Beijing 100029， China;3.Advanced Sensing Department， Wuxi Internet of Things Innovation Center Co. Ltd.， Wuxi 214001， China;4.State key laboratory of Quantum Optics and Quantum Optics Devices， Shanxi University， Taiyuan 030006， China
National Natural Science Foundation of China 61771467 51425505 51935011;Youth Innovation Promotion Association, Chinese Academy of Sciences 2018153;Fund for Shanxi “1331 Project” Key Subject Construction, High Technology Research and Development Project of Guangdong 2019B010117001Supported by National Natural Science Foundation of China (Grant No. 61771467, 51425505 and 51935011), Youth Innovation Promotion Association, Chinese Academy of Sciences (Grant No. 2018153), and Fund for Shanxi “1331 Project” Key Subject Construction, High Technology Research and Development Project of Guangdong (Grant No. 2019B010117001)
As is known, response time of a MEMS infrared (IR) detector is usually measured using a complicated measurement system consisting of a blackbody radiation source, a chopper and a water-cooling apparatus. For such a system, both blocking and hollow patterns in the chopper have certain areas, which consume a certain part of time when the chopper spins at a certain frequency. In conventional measurements of response time, however, it is difficult to exclude the time consumed by a chopper, as a result, a large error is usually introduced into the system. To address such an issue, a response time measurement system for MEMS IR detectors using a fast-pulse laser as its radiation source is proposed in this work. Such a system is able to avoid extra time parameter being introduced by equipment . For a thermopile IR detector, response time measured based on traditional method is 14.46ms, while based on the newly established system, the response time is only 3.13ms. This indicates that the new method can perfectly avoid a 300% time error introduced by the traditional method.
ZHANG Chen-Chen, MAO Hai-Yang, BAI Le-Le, XIONG Ji-Jun, WANG Wei-Bing, CHEN Da-Peng. A response time measurement method For MEMS IR Detectors[J]. Journal of Infrared and Millimeter Waves,2020,39(5):621~627Copy