CMOS compatible multichannel mid-infrared photonic crystal sensor
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Affiliation:

Laboratory of Silicon based Materials and Integrated Devices, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China

Clc Number:

O799,O439

Fund Project:

the Shanghai Sailing Program 18YF1428200 18YF1428100Supported by the Shanghai Sailing Program (No.18YF1428200, No.18YF1428100)

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    Abstract:

    We propose a multichannel two-dimensional optical chemical sensor in a photonic crystal (PhC) slab. The device is composed of four cavities with a center wavelength at 3.3μm, and the channels are spaced by 10nm. The sensor is designed on an 800-nm-thick silicon-on-insulator platform for standard CMOS technology. The optical characteristics of the nanocavity structure are simulated by 3-D finite difference time-domain (FDTD) method. The transmittance of each channel is about 39%, with non-uniformity of transmittance across channels less than 0.25dB. The capability of the sensor is demonstrated by detecting carbon tetrachloride and benzene solutions, and shows a sensitivity of 209.2nm/RIU.

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ZHOU Yi, WANG Lei, LI Jun, YANG Xue-Lei, GAN Feng-Yuan, ZHAO Ying-Xuan, QIU Chao, LI Wei. CMOS compatible multichannel mid-infrared photonic crystal sensor[J]. Journal of Infrared and Millimeter Waves,2020,39(3):279~283

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History
  • Received:November 12,2019
  • Revised:March 28,2020
  • Adopted:February 08,2020
  • Online: March 18,2020
  • Published: