Structured illumination has been used for several decades in the field of three-dimensional（3D）shape measurement and machine vision. However，the bulky structured illumination generation system limits its poten? tial in practical applications. In this paper，a compact design method based on the silicon-on-insulator（SOI）opto? electronic integrated chip is proposed. Compared with the traditional structured light generation methods，the chip-based illumination method is simple，stable and flexible. The beam modulation and interference are achieved by on-chip devices，which efficiently avoids external disturbance and increases the portability of system. This is the first time using only on-chip devices to control the infrared beam and generate structured light pattern. The chip can provide an illumination area of about 200*200 μm2 with the chip size of 0. 5*0. 5 mm. The illumination area and structural period are related to the design of grating couplers and the wavelength of light. Moreover，dif? ferent illumination patterns can be achieved by appropriately designing the optical devices on the chip