IN-SITU DEPOSITION OF PZT FERROELECTRIC THIN FILMS AT LOW TEMPERATURE
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WANG Zhen-Dong, LAI Zhen-Quan, FAN Ding-Huan, ZHANG Jing-Ji, HUANG Qi-Hui. IN-SITU DEPOSITION OF PZT FERROELECTRIC THIN FILMS AT LOW TEMPERATURE[J]. Journal of Infrared and Millimeter Waves,2008,27(3):224~226