Two-dimensional thermal simulations of the microbolometer with a micro-bridge structure by finite element method were done. The effects of pixel size, suspended film thickness, length and width of suspended leg, down-lead, vacuum package on the temperature changes and thermal time constants of pixels induced by ilffrared radiation were analyzed. To compare, the performance of microbolometer with a cavum structure was also discussed.
YUAN Ning-Yi, LI Ge, LI Jin-Hua, CHEN Xiao-Shuang. THERMAL RESPONSE SIMULATION OF MICROBOLOMETER[J]. Journal of Infrared and Millimeter Waves,2006,25(3):183~187Copy