DESIGN AND FABRICATION OF MICRO-CANTILEVER UNCOOLED INFRARED DETECTOR
DOI:
Author:
Affiliation:

Clc Number:

TN215

Fund Project:

  • Article
  • |
  • Figures
  • |
  • Metrics
  • |
  • Reference
  • |
  • Related
  • |
  • Cited by
  • |
  • Materials
  • |
  • Comments
    Abstract:

    A micro-cantilever uncooled infrared(IR) detector was designed and fabricated based on standard silicon process.Because silicon nitride(S_iN_x) and aluminum(Al) have different thermal expansion coefficients,bi-material micro-cantilever that is composed of the films of S_iN_x and Al will bend when it absorbs IR radiation and its temperature changes.The variable micro-capacitor between the micro-cantilever and the substrate will change as the micro-cantilever bends.Hence,the information of IR radiation can be known when the change of the variable micro-capacitor is detected.The test of a single detector by outer apparatus shows that the micro-cantilever has strong response to IR radiation.

    Reference
    Related
    Cited by
Get Citation

LIU Hai-Tao, CHEN Yong-Ping, LIANG Ping-Zhi. DESIGN AND FABRICATION OF MICRO-CANTILEVER UNCOOLED INFRARED DETECTOR[J]. Journal of Infrared and Millimeter Waves,2006,25(1):46~49

Copy
Share
Article Metrics
  • Abstract:
  • PDF:
  • HTML:
  • Cited by:
History
  • Received:May 23,2005
  • Revised:November 27,2005
  • Adopted:
  • Online:
  • Published: