APPLICATION OF LASER BEAM INDUCED CURRENT FOR TECHNOLOGY DETECTING OF HgCdTe TWO-COLOR DETECTOR
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TN4

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    Abstract:

    The application of laser beam induced current(LBIC)for the technology detecting of Mercury-Cadmium-Telluride(HgCdTe)infrared two-color detector was presented.By LBIC test,it ws found that the area of n-type region derived from p-type HgCdTe having been implanted by Boron ion was larger than the area to be implanted,and the precise transversal distribution of this n region was also obtained.At the same time,the transversal distributions of plasma etching induced n-type doping HgCdTe from p-type material among the side wall of etched mesa was obtained,and the relation between the transversal width of this n-type region and the energy of etching plasma was also achieved.

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YE Zhen-Hua, HU Xiao-Ning, CAI Wei-Ying, CHEN Gui-Bin, LIAO Qing-Jun, ZHANG Hai-Yan, HE Li. APPLICATION OF LASER BEAM INDUCED CURRENT FOR TECHNOLOGY DETECTING OF HgCdTe TWO-COLOR DETECTOR[J]. Journal of Infrared and Millimeter Waves,2005,24(6):459~462

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  • Received:December 18,2004
  • Revised:May 18,2005
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