BIMATERIAL MICRO-CANTILEVER UNCOOLED INFRARED IMAGING SYSTEM--DESIGN AND FABRICATION OF MICRO-CANTILEVER ARRAY
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DONG Feng-Liang~,ZHANG Qing-Chuan~,WU Xiao-Ping~,PAN Liang~,GUO Zhe-Ying~,CHEN Da-Peng~,WANG Wei-Bing~,DUAN Zhi-Hui~. BIMATERIAL MICRO-CANTILEVER UNCOOLED INFRARED IMAGING SYSTEM--DESIGN AND FABRICATION OF MICRO-CANTILEVER ARRAY[J]. Journal of Infrared and Millimeter Waves,2005,24(6):409~413

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  • Received:November 15,2004
  • Revised:May 16,2005
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