CHARACTERIZATION OF UNCOOLED VO<sub>2</sub>-BASED THIN FILMS BOLOMETER

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CHARACTERIZATION OF UNCOOLED VO2-BASED THIN FILMS BOLOMETER
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用微电子工艺制备了VO

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CHEN Chang-Hong. CHARACTERIZATION OF UNCOOLED VO₂-BASED THIN FILMS BOLOMETER[J]. Journal of Infrared and Millimeter Waves,2001,20(2):136~138

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